| |
|
|
| |
8" |
12" |
| |
RD |
FRD |
RD |
FRD |
|
IPA |
39cc/batch |
39cc/batch |
60cc/batch |
60cc/batch |
|
DIW |
13ℓ/batch |
311ℓ/batch |
22ℓ/batch |
316ℓ/batch |
|
PN2 |
380ℓ/batch |
380ℓ/batch |
553ℓ/batch |
553ℓ/batch |
|
|
| |
- IPA: Based on
using Bubbler 2ea
- DIW: Based on using High Flow 30LPM; Low Flow 2.5 LPM
- PN2: Based on using 40 LPM |
|
|
|
|
|
