Process Specifications-300mm for RD and FRD

ITEMS RD FRD Process Time(cassette-less) Less than 8min. Less than 19min. Throughput (50sls/batch) 375 sls/hr 157 sls/hr Particle Data (≥0.12㎛) Hydrophobic: ≤30ea Hydrophobic: ≤30ea Hydrophilic: ≤10ea Hydrophilic: ≤10ea Water Mark None None Metal Level 5 X 109 atoms/㎠ 5 X 109 atoms/㎠ Etching Uniformity   Less than 5%

Process Specifications-200mm for RD and FRD

ITEMS RD FRD Process Time(cassette-less) Less than 5min. Less than 16min. Throughput (50sls/batch) 600 sls/hr 187 sls/hr Particle Data (≥0.12㎛) Hydrophobic: ≤30ea Hydrophobic: ≤30ea Hydrophilic: ≤10ea Hydrophilic: ≤10ea Water Mark None None Metal Level 5 X 109 atoms/㎠ 5 X 109 atoms/㎠ Etching Uniformity   Less than 5%