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Common
Features
of
FRD |
No. |
Item |
Connection |
Technical Data |
| 1 |
Power (UPS) |
R, S, T, G |
208 VAC, 3
Phase,
60 Hz, 50A, 4 Wire |
| 2 |
DI Water-1 |
3/4” Pillar
Super 300 |
1.5 Bar, < 40
LPM |
| 3 |
DI Water-2 |
3/4” Pillar
Super 300 |
1.5 Bar, < 40
LPM |
| 4 |
DI Water-3 |
3/4” Pillar
Super 300 |
1.5 Bar, < 40
LPM |
| 5 |
PN2
(Process Gas) |
SWG 1/2” |
6 Bar, < 100
LPM |
| 6 |
PN2 (Purge Gas) |
SWG 1/2” |
6 Bar, < 100
LPM |
| 7 |
CDA
(Valve Operation) |
SWG 1/2” |
6 Bar, < 60
LPM |
| 8 |
IPA |
SWG 1/2” |
0.7 Bar, < 3
LPM |
| 9 |
Exhaust 1 (IPA) |
100 Φ |
SUS Flange, <
0.3 Kpa |
| 10 |
Exhaust 2 (HF) |
100 Φ |
PVC Flange, <
0.3 Kpa |
| 11 |
Drain 1(HF) |
65A Union |
HT PVC |
| 12 |
Drain 2 (DIW) |
65A Union |
HT PVC |
| 13 |
Drain 3 (Safety) |
20A Union |
HT PVC |
| 14 |
Drain 4 (IPA) |
SWG 1/2” |
SWG |
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Common
Features
of
FRD |
No. |
Item |
Connection |
Technical Data |
| 1 |
DI Water |
3/4” Pillar
Super 300 |
1.5 Bar, < 50
LPM |
| 2 |
HF (49%) |
3/4” Pillar
Super 300 |
< 10 LPM |
| 3 |
PN2 (Process Gas) |
SWG 1/2” |
6 Bar, < 100
LPM |
| 4 |
PN2 (Purge Gas) |
SWG 1/2” |
6 Bar, < 100
LPM |
| 5 |
CDA 1
(Pump Operation) |
SWG 1/2” |
6 Bar, < 100
LPM |
| 6 |
CDA 2
(Valve Operation) |
SWG 1/2” |
6 Bar, < 60
LPM |
| 7 |
Exhaust (HF) |
100 Φ |
PVC Flange, <
0.3 Kpa |
| 8 |
Drain 1 (DHF) |
50A Union |
HT PVC |
| 9 |
Drain 2 (Safety) |
20A Union |
HT PVC |
| 10 |
Cooling Water
(PCW) |
SWG 1/2” |
3 Bar, < 30
LPM |
| 11 |
Cooling Water Return
(PCW) |
SWG 1/2” |
SWG |
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