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Common
Features
of
RD |
No. |
Item |
Connection |
Technical
Data |
| 1 |
Power (UPS) |
R, S, T, G |
208 VAC, 3 Phase,
60 Hz, 20A, 4 Wire |
| 2 |
DI Water |
3/4” Pillar
Super 300 |
1.5 Bar, < 50 LPM |
| 3 |
PN2 (Process Gas) |
SWG 1/2” |
6 Bar, < 200 LPM |
| 4 |
CDA (Valve Operation) |
SWG 1/2” |
6 Bar, < 100 LPM |
| 5 |
IPA |
SWG 1/2” |
0.7 Bar, < 10 LPM |
| 6 |
Exhaust |
100 Φ |
SUS Flange, < 0.3
Kpa |
| 7 |
Drain 1 (Process bath) |
50A Union |
HT PVC |
| 8 |
Drain 2 (Safety drain) |
20A Union |
HT PVC |
| 9 |
Drain 3 (IPA) |
SWG 1/2” |
SWG |
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