EXTERNAL TORCHES

 

Advantages:

  • Soft gas start with MFC control to prevent any mishap

  • Soft swirl pattern of injected steam insures most uniform layer to all wafers

  • Speedy ignition, achieves 850C less than a minute from the start

  • Redundant safety interlocks

  • Real time flame monitoring by an UV detector

  • Universal joint adaptable all kind furnaces from horizontal to vertical

  • RS232 interface from torch controller to the furnace controller

Features:

  • Hydrogen is ignited with a ramp (soft start) to assure safe ignition and generation of the steam.

  • The external torch can interface with both horizontal and vertical furnaces.

  • Hydrogen maximum flow capacity: 30 liters per minute.

  • The hydrogen is ignited by the halogen lamp heating a non-doped silicon target to over 850 degrees centigrade. Special design of H2 nozzle prevents the flame touching to neither to the its tip nor inside of the quartz chamber. This unique design prevents devitrification of the quartz chamber and assures no particulate contamination into the process tube.

  • Steam is generated inside the high purity quartz chamber.

  • Water cooling of the torch and halogen lamp.

  • Soft swirl pattern of injected steam insures a more even deposition, from the first wafer in the load to the last.

  • UV Flame detector shuts off the hydrogen flow if a flame is not detected during operation.

  • Real-time touch screen simplifies and speeds setup and operation.

  • Safety interlocks for a safe operation.

Specifications:

300W x 460L x 360H. The vertical and horizontal adjustable base assures a proper fit with the furnace tube.

Power requirements: AC 120 volts, 15 amps

Other requirements: ¼" Nitrogen Teflon tube, ¼" Hydrogen Teflon tube, ¼" Oxygen Teflon tube, Cooling water 3/8" tube

Optional HCL injector. HCL can be injected through the oxygen line or at the ball/socket connection with the furnace tube.

Water cooling jacket: aluminum alloy

Cooling water inlets: stainless steel

Quartz chamber: Kimmon KF-F1, high purity, high OH, low sodium flame fused material to prevent ion extraction at high temperatures.

U.S. based service technicians and a centrally located, Fort Worth Texas parts warehouse .

Weight: 14kg

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