DI WATER HEATERS GENERAL

The remaining residues from chemical processing will be dissolving faster in hot DI and it also prevents thermal shock. That means increased yields,  throughput and DI water savings to you. The Kimmon HDWII series6, 12, 18, 24, and 36 liter high-purity quartz DI Water Heater system heats DI water to facilitate washing (i.e., phosphoric, hydrofluoric, sulfuric acid, etc.) semiconductor wafers and other similar materials (see cleaning applications below) during fabrication.

    FEATURES

• Halogen heaters gives fast response for temperature changes

• The heating tanks are made from high purity KF-F1 transparent quartz glass. All of the other "wet" portions of the system (piping, valves, sensors, and connectors) are made from high purity fluorocarbon resin (PFA, PTFE, and PVDF) provide an ultra pure flow path without elastomer o-rings or particle traps. This design eliminates DI water contamination from water heater system induced impurities such as metallic ions, organic compounds, and microbes.

• Halogen lamps are used as heating elements and provide the superior heating characteristics of: high purity heating, higher heating thermal efficiency (typically > 96%), higher start-up speed, and lower operating cost

• PID function gives smooth and steady control within ± 1ºC.

• Halogen lamps do not contact to the heating tanks surface like competitors to prevent ionic contamination. This prevent sodium extraction from quartz to the process water.

• Its intelligent design allows the DI heater operate in a particle-neutral state, eliminating process contaminating risk. 

• Real time touch screen gives to process engineer an easy access to set temperature parameters and it pops up the any kind of interlock to the troubleshooting technician to pinpoint where the incident occurred. It eliminates  the guess work of competitors LEd diagnostic, our touch screen shows the problem with a picture which heater is gone bad in a tank and all.

• Compact design.

• Footprint 1' x 3' no installation necessary..

• Ease of maintenance.

• One year warranty on equipment and labor.

• RS232 remote control option

• Built with SEMI S2-93 standards

   SAFETY FEATURES

• Safety functions are provided to protect against overheating of DI water and/or tank and redundant over-temperature protection

• Heater breakage

• Over pressure relief

• Water leakage

• Shortage of DI water means low pressure monitoring

• Power interruption

• Automatic power shut-down

• Temperature sensor failure

• Complete water containment with drain fittings for leakage or breakage control, is provided.

• Audible alarm

    TYPICAL CLEANING APPLICATIONS

• Silicon wafers

• Compound semiconductor wafers

• Liquid crystal (LCD) and FPD substrates

• Magnetic discs

• Optical discs

• Photo-mask substrates

• Printed circuit boards

[Dimensions | Picture]